1 Scope
2 Normative references, terms and definitions
3 Symbols
4 Characteristics of scanning probe microscopes
5 Preliminary characterization of the measuring system
6 Calibration
7 Report of calibration results
8 Uncertainties of measurement
9 Report of results (form)
Annex A (informative) - Exemplary superposition of
disturbing influences in the topography
Annex B (informative) - Sound investigations: Effects
of a sound proofing hood
Annex C (informative) - Thermal isolation effect of a
sound proofing hood/measuring cabin
Annex D (informative) - Control parameters and scan
speed; handling of contaminations
Annex E (informative) - Step height determination:
comparison histogram and ISO 5436 method
Annex F (normative) - Uncertainty of measurement for
lateral measurands
Bibliography