Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Image magnification
5 Reference material
6 Calibration procedures
7 Accuracy of image magnification and scale marker
8 Calibration report
Annex A (informative) - Reference materials for magnification
Annex B (informative) - Parameters that influence the
resultant magnification of an SEM
Annex C (informative) - Uncertainties in magnification
measurements
Annex D (informative) - Example of a test report
Bibliography