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  • ASME MFC 21.1 : 1900

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    Superseded A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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    MEASUREMENT OF GAS FLOW BY MEANS OF CAPILLARY TUBE THERMAL MASS FLOWMETERS AND MASS FLOW CONTROLLERS

    Available format(s):  Hardcopy, PDF

    Superseded date:  27-08-2021

    Language(s):  English

    Published date: 

    Publisher:  American Society of Mechanical Engineers

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    Table of Contents - (Show below) - (Hide below)

    Foreword
    Committee Roster
    Correspondence With the MFC Committee
    1 Scope
    2 Terminology, Symbols, and References
    3 General Description
    4 Performance and Operating Specifications
    5 Principle of Operation
    6 Standard Volumetric Flow Rate
    7 Conversion From One Gas to Another
    8 Best Practices
    Mandatory Appendix
    I - Gas Flow Calibration
    Nonmandatory Appendices
    A - Energy Equation for the Gas Flowing in the
        Sensor Tube
    B - Bibliography

    Abstract - (Show below) - (Hide below)

    Describes common terminology and provides guidelines for the quality, description, principle of operation, selection, operation, installation, and flow calibration of capillary tube thermal mass flowmeters and mass flow controllers for the measurement and control of the mass flow rate of gases.

    General Product Information - (Show below) - (Hide below)

    Document Type Standard
    Publisher American Society of Mechanical Engineers
    Status Superseded
    Superseded By

    Standards Referencing This Book - (Show below) - (Hide below)

    SEMI E56 : 2017 TEST METHOD FOR DETERMINING ACCURACY, LINEARITY, REPEATABILITY, SHORT-TERM REPRODUCIBILITY, HYSTERESIS, AND DEADBAND OF THERMAL MASS FLOW CONTROLLERS
    SEMI E69 : 1998(R2013) TEST METHOD FOR DETERMINING REPRODUCIBILITY AND ZERO DRIFT FOR THERMAL MASS FLOW CONTROLLERS
    SEMI E12 : 2013 GUIDE FOR STANDARDIZED PRESSURE, TEMPERATURE, DENSITY, AND FLOW UNITS USED IN MASS FLOW METERS AND MASS FLOW CONTROLLERS
    ISO/IEC Guide 99:2007 International vocabulary of metrology Basic and general concepts and associated terms (VIM)
    SEMI E52 : 2013 PRACTICE FOR REFERENCING GASES, GAS MIXTURES, AND VAPORIZABLE MATERIALS USED IN DIGITAL MASS FLOW CONTROLLERS
    SEMI E29 : 2010(R2017) TERMINOLOGY FOR THE CALIBRATION OF MASS FLOW CONTROLLERS AND MASS FLOW METERS
    SEMI E77 : 2004(R2015) TEST METHOD FOR CALCULATION OF CONVERSION FACTORS FOR A MASS FLOW CONTROLLER USING SURROGATE GASES
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