ASTM F 1367 : 1998

Superseded

Superseded A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

Standard Specification for Chromium Sputtering Targets for Thin Film Applications

Available format(s): Hardcopy, PDF

Superseded date: 11-11-2014

Language(s): English

Published date: 31-12-2010

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CONTAINED IN VOL. 10.04, 2015 Defines sputtering targets fabricated from chromium metal.

1.1 This specification covers sputtering targets fabricated from chromium metal.

1.2 This specification sets purity grade levels, physical attributes, analytical methods and packaging requirements.

1.3 The values stated in SI units are regarded as standard.

Committee	F 01
Document Type	Standard
ISBN
Pages
Product Note	Reconfirmed 1998
Published
Publisher	American Society for Testing and Materials
Status	Superseded
Superseded By	ASTM F 1367 : 1998 : R2003

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CONTAINED IN VOL. 10.04, 2015 Defines sputtering targets fabricated from chromium metal.

1.1 This specification covers sputtering targets fabricated from chromium metal.

1.2 This specification sets purity grade levels, physical attributes, analytical methods and packaging requirements.

1.3 The values stated in SI units are regarded as standard.

Committee	F 01
Document Type	Standard
ISBN
Pages
Product Note	Reconfirmed 1998
Published
Publisher	American Society for Testing and Materials
Status	Superseded
Superseded By	ASTM F 1367 : 1998 : R2003