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  • BS EN ISO 25178-603:2013

    Current The latest, up-to-date edition.

    Geometrical product specifications (GPS). Surface texture: Areal Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments

    Available format(s):  Hardcopy, PDF

    Language(s):  English

    Published date:  31-10-2013

    Publisher:  British Standards Institution

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    Table of Contents - (Show below) - (Hide below)

    Foreword
    Introduction
    1 Scope
    2 Terms and definitions
    3 Descriptions of the influence quantities
    Annex A (informative) Components of a phase-shifting
            interferometric (PSI) microscope
    Annex B (informative) - Phase-shifting interferometric
            (PSI) microscope - Theory of operation
    Annex C (informative) - Errors and corrections for
            phase-shifting interferometric (PSI) microscopes
    Annex D (informative) - Relation to the GPS
            matrix model
    Bibliography

    Abstract - (Show below) - (Hide below)

    Defines the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.

    Scope - (Show below) - (Hide below)

    This part of ISO25178 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.

    General Product Information - (Show below) - (Hide below)

    Committee TPR/1
    Document Type Standard
    Publisher British Standards Institution
    Status Current

    Standards Referencing This Book - (Show below) - (Hide below)

    ISO/TR 14638:1995 Geometrical product specification (GPS) Masterplan
    ISO 8015:2011 Geometrical product specifications (GPS) Fundamentals Concepts, principles and rules
    ISO 4287:1997 Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters
    ISO 14978:2006 Geometrical product specifications (GPS) General concepts and requirements for GPS measuring equipment
    ISO 25178-6:2010 Geometrical product specifications (GPS) Surface texture: Areal Part 6: Classification of methods for measuring surface texture
    ISO 10934-2:2007 Optics and optical instruments Vocabulary for microscopy Part 2: Advanced techniques in light microscopy
    ISO 14253-1:2017 Geometrical product specifications (GPS) — Inspection by measurement of workpieces and measuring equipment — Part 1: Decision rules for verifying conformity or nonconformity with specifications
    ASME B46.1 : 2009 SURFACE TEXTURE (SURFACE ROUGHNESS, WAVINESS, AND LAY)
    ISO 25178-3:2012 Geometrical product specifications (GPS) — Surface texture: Areal — Part 3: Specification operators
    ISO/IEC Guide 99:2007 International vocabulary of metrology Basic and general concepts and associated terms (VIM)
    ISO 25178-601:2010 Geometrical product specifications (GPS) — Surface texture: Areal — Part 601: Nominal characteristics of contact (stylus) instruments
    ISO 25178-602:2010 Geometrical product specifications (GPS) — Surface texture: Areal — Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments
    ISO 25178-2:2012 Geometrical product specifications (GPS) Surface texture: Areal Part 2: Terms, definitions and surface texture parameters
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