Foreword
Introduction
1 Scope
2 Normative references
3 Terms, definitions and abbreviated terms
4 Specimen preparation for cross-sectional imaging
5 Determination of an interface position
6 Detailed procedure for determining the position of
the interface
7 Uncertainty
Annex A (informative) - Examples of processing the
real TEM/STEM images for three image types
Annex B (informative) - Two main applications for
this method
Annex C (informative) - Calibration of scale unit: Pixel
size calibration
Bibliography