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SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 6: AXIAL FATIGUE TESTING METHODS OF THIN FILM MATERIALS
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Available format(s): Hardcopy, PDF
Language(s): English
Published date: 01-01-2011
Publisher: Comitato Elettrotecnico Italiano
FOREWORD1 Scope2 Normative references 3 Terms and definitions 4 Test piece 5 Testing method and test apparatus6 Endurances (test termination)7 Test reportAnnex A (informative) - Technical background of this standard Annex B (informative) - Test piece Annex C (informative) - Displacement measurement Annex D (informative) - Testing environmentAnnex E (informative) - Number of test pieces BibliographyAnnex ZA (normative) - Normative references to international publications with their corresponding European publications
Describes the method for axial tensile-tensile force fatigue testing of thin film materials with a length and width under 1 mm and a thickness in the range between 0,1 [mu]m and 10 [mu]m under constant force range or constant displacement range.
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