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  • DIN 50451-2:2003-04

    Withdrawn A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.

    Determination of trace elements in liquids for use in semiconductor technology - Part 2: Determination of calcium, chromium, cobalt, copper, iron, nickel and zinc in hydrofluoric acid by plasma emission spectroscopy

    Available format(s):  Hardcopy, PDF

    Withdrawn date:  02-10-2023

    Language(s):  English, German

    Published date:  01-04-2003

    Publisher:  German Institute for Standardisation (Deutsches Institut für Normung)

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    Table of Contents - (Show below) - (Hide below)

    Foreword
    1 Scope
    2 Normative references
    3 Concept
    4 Unit
    5 Principle
    6 Reagents
    7 Apparatus and cleaning
    8 Sampling
    9 Sample pretreatment
    10 Preparation of blank solutions
    11 Procedure
    12 Calculation and expression of results
    13 Precision
    14 Test report

    Abstract - (Show below) - (Hide below)

    The method described serves to examine, by plasma-induced (ICP or DCP) spectrometry, hydrofluoric acid for the presence of cobalt (Co), chromium (Cr), copper (Cu) and iron (Fe) and nickel (Ni) in amounts of 1 to 1000 ng/g. The presence of these metals is of relevance in the field of semi-conductor technology.

    General Product Information - (Show below) - (Hide below)

    Document Type Standard
    Publisher German Institute for Standardisation (Deutsches Institut für Normung)
    Status Withdrawn
    Supersedes

    Standards Referencing This Book - (Show below) - (Hide below)

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    DIN 51401-1:2001-12 ATOMIC ABSORPTION SPECTROMETRY (AAS) - PART 1: TERMS
    ISO 1042:1998 Laboratory glassware One-mark volumetric flasks
    DIN 51008-2:2001-12 OPTICAL EMISSION SPECTROMETRY (OES) - PART 2: TERMS FOR FLAME AND PLASMA SYSTEMS
    DIN 8120-1:1981-07 WEIGHING MACHINES; TERMS AND DEFINITIONS
    DIN 32645:2008-11 CHEMICAL ANALYSIS - DECISION LIMIT, DETECTION LIMIT AND DETERMINATION LIMIT UNDER REPEATABILITY CONDITIONS - TERMS, METHODS, EVALUATION
    ISO 8655-2:2002 Piston-operated volumetric apparatus Part 2: Piston pipettes
    ISO 14644-1:2015 Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
    ISO 3696:1987 Water for analytical laboratory use — Specification and test methods
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