SEMI F2 : 1994

Withdrawn

Withdrawn A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.

SPECIFICATION FOR 316L STAINLESS STEEL TUBING FOR GENERAL PURPOSE SEMICONDUCTOR MANUFACTURING APPLICATIONS

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Withdrawn date: 01-07-2003

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Published date: 12-01-2013

Publisher: Semiconductor Equipment & Materials Institute

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Identifies applicable ASTM tubing specification requirements for 316L stainless steel tubing for use in semiconductor manufacturing facilities. As designated in ASTM A 269 nominal-wall-thickness stainless steel tubing for use in chemical/liquid/gas distribution systems in semiconductor manufacturing facilities and related research/development areas.

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Development Note	Not available for sale from ILI, customer to contact SEMI. (05/2001)
Document Type	Standard
ISBN
Pages
Published
Publisher	Semiconductor Equipment & Materials Institute
Status	Withdrawn

Standards Referenced By This Book - (Show below) - (Hide below)

SEMI F6 : 1992	GUIDE FOR SECONDARY CONTAINMENT OF HAZARDOUS GAS PIPING SYSTEMS

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