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TEST METHOD FOR DETERMINATION OF MOISTURE DRY-DOWN CHARACTERISTICS OF SURFACE-MOUNTED AND CONVENTIONAL GAS DELIVERY SYSTEMS BY ATMOSPHERIC PRESSURE IONIZATION MASS SPECTROMETRY (APIMS)
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Published date: 12-01-2013
Publisher: Semiconductor Equipment & Materials Institute
Describes the procedure for determination of the moisture dry-down characteristics (quantity of removable moisture) of surface mount and conventional gas distribution systems (integrated gas distribution systems).
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