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  • VDI/VDE 2655 Blatt 1.2:2010-10

    Current The latest, up-to-date edition.

    Optical measurement of microtopography - Calibration of confocal microscopes and depth setting standards for roughness measurement

    Available format(s):  Hardcopy, PDF

    Language(s):  German - English

    Published date:  01-10-2010

    Publisher:  Verlag des Vereins Deutscher Ingenieure

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    Table of Contents - (Show below) - (Hide below)

    Preliminary note
    Introduction
    1 Scope
    2 Terms and definitions
    3 Symbols and subscripts
    4 Properties of confocal
      microscopes
    5 Calibration and specification
    6 Report of results of the
      instrument calibration
    7 Measurement uncertainty
    Bibliography

    Abstract - (Show below) - (Hide below)

    The guideline describes procedures for the calibration of imaging confocal microscopes and depth setting standards for roughness measurement and thus forms the basis for the traceability of measuring systems to national standards.

    General Product Information - (Show below) - (Hide below)

    Development Note Supersedes VDE-VDI 2604. (10/2010)
    Document Type Standard
    Publisher Verlag des Vereins Deutscher Ingenieure
    Status Current
    Supersedes

    Standards Referencing This Book - (Show below) - (Hide below)

    EN ISO 4287:1998/A1:2009 GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - TERMS, DEFINITIONS AND SURFACE TEXTURE PARAMETERS
    ISO 12179:2000 Geometrical Product Specifications (GPS) Surface texture: Profile method Calibration of contact (stylus) instruments
    ISO 4287:1997 Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters
    EN ISO 4288 : 1997 GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - RULES AND PROCEDURES FOR THE ASSESSMENT OF SURFACE TEXTURE
    EN ISO 12179:2000/AC:2008 GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - CALIBRATION OF CONTACT (STYLUS) INSTRUMENTS
    EN ISO 11562:1997/AC:2008 GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - METROLOGICAL CHARACTERISTICS OF PHASE CORRECT FILTERS
    VDI 1000:2017-02 VDI Standardisation Work - Principles and procedures
    ISO 3274:1996 Geometrical Product Specifications (GPS) — Surface texture: Profile method — Nominal characteristics of contact (stylus) instruments
    ISO 12853:2015 Microscopes Information provided to the user
    ENV 13005 : DRAFT 1999 GUIDE TO THE EXPRESSION OF UNCERTAINTY IN MEASUREMENT
    ISO 5436-1:2000 Geometrical Product Specifications (GPS) — Surface texture: Profile method; Measurement standards — Part 1: Material measures
    DIN EN ISO 11562:1998-09 GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - METROLOGICAL CHARACTERISTICS OF PHASE CORRECT FILTERS
    EN ISO 3274 : 1997 GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - NOMINAL CHARACTERISTICS OF CONTACT (STYLUS) INSTRUMENTS
    DKD-3 : 1998 EXPRESSION OF THE UNCERTAINTY OF MEASUREMENT IN CALIBRATION
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