VDI/VDE 2656 Blatt 1:2008-06

Superseded

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Determination of geometrical quantities by using of Scanning Probe Microscopes - Calibration of measurement systems

Available format(s): Hardcopy, PDF

Superseded date: 04-09-2019

Language(s): German - English

Published date: 01-06-2008

Publisher: Verlag des Vereins Deutscher Ingenieure

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Preliminary note
Introduction
1. Definitions
2. Terms and definitions
3. Symbols
4. Characteristics of scanning probe microscopes
5. Preliminary characterization of the measuring system
6. Calibration
7. Result report
8. Uncertainties of measurement
9. Result report (specimen)
Bibliography
Annex A - Exemplary superposition of disturbing
          influences in the topography image
Annex B - Exemplary investigation of the lateral
          scanner drift (category C)
Annex C - Sound investigations: Effects of a sound
          proofing hood
Annex D - Thermal isolation effect of a sound proofing
          hood/measuring cabin
Annex E - Control parameters and scan speed - handling
          of contaminations
Annex F - Step height determination - comparison between
          histogram and ISO-5436 method
Annex G - Uncertainty of measurement for lateral measureands
          (pitch, position, diameter)

Abstract - (Show below) - (Hide below)

Describes the restricted to scanning probe microscopes and their calibration.

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Document Type	Standard
ISBN
Pages
Published
Publisher	Verlag des Vereins Deutscher Ingenieure
Status	Superseded
Superseded By	VDI/VDE 2656 Blatt 1:2019-09
Supersedes	VDI/VDE 2656 Blatt 1:2006-12 (Draft)

Standards Referencing This Book - (Show below) - (Hide below)

EN ISO 4287:1998/A1:2009	GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - TERMS, DEFINITIONS AND SURFACE TEXTURE PARAMETERS
ISO 12179:2000	Geometrical Product Specifications (GPS) Surface texture: Profile method Calibration of contact (stylus) instruments
ISO 4287:1997	Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters
EN ISO 4288 : 1997	GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - RULES AND PROCEDURES FOR THE ASSESSMENT OF SURFACE TEXTURE
EN ISO 12179:2000/AC:2008	GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - CALIBRATION OF CONTACT (STYLUS) INSTRUMENTS
VDI 1000:2017-02	VDI Standardisation Work - Principles and procedures
ISO 3274:1996	Geometrical Product Specifications (GPS) — Surface texture: Profile method — Nominal characteristics of contact (stylus) instruments
ISO 12853:2015	Microscopes Information provided to the user
ENV 13005 : DRAFT 1999	GUIDE TO THE EXPRESSION OF UNCERTAINTY IN MEASUREMENT
ISO 5436-1:2000	Geometrical Product Specifications (GPS) — Surface texture: Profile method; Measurement standards — Part 1: Material measures
VDI/VDE 2655 Blatt 1.1:2008-03	Optical measurement and microtopographies - Calibration of interference microscopes and depth measurement standards for roughness measurement
EN ISO 3274 : 1997	GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - NOMINAL CHARACTERISTICS OF CONTACT (STYLUS) INSTRUMENTS
EN ISO 5436-1 : 2000	GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD; MEASUREMENT STANDARDS - PART 1: MATERIAL MEASURES

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