Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 Principle of capacitance diaphragm gauge
6 Specifications for capacitance diaphragm
gauge
7 Additional (Optional) specifications for
capacitance diaphragm gauge
8 Calibration
9 Measurement uncertainty at use
Annex A (informative) - Compensation of
thermal transpiration effect
Bibliography