FOREWORD
0 Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols
5 Apparatus
6 Sampling and specimens
7 Geometric calibration
8 Measurement procedure
9 Computation of encircled flux
10 Results
11 Specification information
Annex A (informative) Measurement sensitivity considerations
Annex B (informative) Theory of geometric calibration using
the micropositioner
Annex C (normative) Procedure for geometric calibration using
the micropositioner
Bibliography
Annex ZA (normative) Normative references to international
publications with their corresponding European
publications