• SEMI C1.2 : 1996

    Superseded A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

    STANDARD FOR ACETONE

    Available format(s): 

    Superseded date:  01-03-2001

    Language(s): 

    Published date:  12-01-2013

    Publisher:  Semiconductor Equipment & Materials Institute

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    Intended to establish the general procedures, specifications, definitions, and analytical procedures for acetone. Products within all of the requirements can be described as "meeting SEMI specifications." Where analytical procedure differs from that provided and is substituted by a user or supplier, the burden of proof is on said user or supplier to confirm the equivalency.

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    Development Note Not available for sale from ILI, customer to contact SEMI. (02/2005)
    Document Type Standard
    Publisher Semiconductor Equipment & Materials Institute
    Status Superseded
    Superseded By
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