SEMI F42 : 2000

Superseded

Superseded A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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TEST METHOD FOR SEMICONDUCTOR PROCESSING EQUIPMENT VOLTAGE SAG IMMUNITY

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Superseded date: 01-07-2006

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Published date: 12-01-2013

Publisher: Semiconductor Equipment & Materials Institute

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Describes the test method used to characterize the susceptibility of semiconductor processing, metrology, and automated test equipment to voltage sags. Also describes the testing procedures and test equipment required to characterize the susceptibility of equipment to voltage sags by showing voltage sag duration and magnitude performance data for the equipment.

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Development Note	Not available for sale from ILI, customer to contact SEMI. (05/2001)
Document Type	Standard
ISBN
Pages
Published
Publisher	Semiconductor Equipment & Materials Institute
Status	Superseded
Superseded By	SEMI F47 : 2006(R2012)

Standards Referencing This Book - (Show below) - (Hide below)

SEMI S2 : 2016B	ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT

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