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  • SEMI M18 : 2012

    Current The latest, up-to-date edition.

    GUIDE FOR DEVELOPING SPECIFICATION FORMS FOR ORDER ENTRY OF SILICON WAFERS

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    Published date:  12-01-2013

    Publisher:  Semiconductor Equipment & Materials Institute

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    Abstract - (Show below) - (Hide below)

    Describes the methodology for developing specification forms for order entry including: - how to identify form sections, form columns, and form headings; - instructions for line format and how to number items; - how to add new items appropriate to a given wafer product to the form, and - how to reference new items from another section of the form.

    General Product Information - (Show below) - (Hide below)

    Development Note Not available for sale from ILI, customer to contact SEMI. (05/2001)
    Document Type Standard
    Publisher Semiconductor Equipment & Materials Institute
    Status Current

    Standards Referenced By This Book - (Show below) - (Hide below)

    SEMI M24 : 2007 SPECIFICATION FOR POLISHED MONOCRYSTALLINE SILICON PREMIUM WAFERS
    SEMI M1 : 2017 SPECIFICATION FOR POLISHED SINGLE CRYSTAL SILICON WAFERS
    SEMI T6 : 1997(R2004) PROCEDURE AND FORMAT FOR REPORTING OF TEST RESULTS BY ELECTRONIC DATA INTERCHANGE (EDI)
    SEMI M47 : 2007 SPECIFICATION FOR SILICON-ON-INSULATOR (SOI) WAFERS FOR CMOS LSI APPLICATIONS
    ASTM F 154 : 2002 Standard Guide for Identification of Structures and Contaminants Seen on Specular Silicon Surfaces (Withdrawn 2003)
    SEMI M62 : 2017 SPECIFICATIONS FOR SILICON EPITAXIAL WAFERS
    SEMI M61 : 2007(R 2019) SPECIFICATION FOR SILICON EPITAXIAL WAFERS WITH BURIED LAYERS
    ASTM F 1241 : 1995 : R2000 Standard Terminology of Silicon Technology (Withdrawn 2003)
    SEMI M2 : 2003 SPECIFICATION FOR SILICON EPITAXIAL WAFERS FOR DISCRETE DEVICE APPLICATIONS
    SEMI M32 : 2007 GUIDE TO STATISTICAL SPECIFICATIONS
    SEMI M11 : 2004 SPECIFICATIONS FOR SILICON EPITAXIAL WAFERS FOR INTEGRATED CIRCUIT (IC) APPLICATIONS

    Standards Referencing This Book - (Show below) - (Hide below)

    SEMI M71 : 2012 SPECIFICATION FOR SILICON-ON-INSULATOR (SOI) WAFERS FOR CMOS LSI
    SEMI M59 : 2014 TERMINOLOGY FOR SILICON TECHNOLOGY
    SEMI M41 : 2015 SPECIFICATION OF SILICON-ON-INSULATOR (SOI) FOR POWER DEVICE/ICS
    SEMI M24 : 2007 SPECIFICATION FOR POLISHED MONOCRYSTALLINE SILICON PREMIUM WAFERS
    SEMI M57 : 2016 SPECIFICATION FOR SILICON ANNEALED WAFERS
    SEMI M8 : 2012 SPECIFICATION FOR POLISHED MONOCRYSTALLINE SILICON TEST WAFERS
    SEMI M61 : 2007(R 2019) SPECIFICATION FOR SILICON EPITAXIAL WAFERS WITH BURIED LAYERS
    SEMI M62 : 2017 SPECIFICATIONS FOR SILICON EPITAXIAL WAFERS
    SEMI M38 : 2012(R2018) SPECIFICATION FOR POLISHED RECLAIMED SILICON WAFERS
    SEMI M16 : 2010(R2015) SPECIFICATION FOR POLYCRYSTALLINE SILICON
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