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  • SEMI S14 : 2016

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    Superseded A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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    SAFETY GUIDELINES FOR FIRE RISK ASSESSMENT AND MITIGATION FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT

    Available format(s): 

    Superseded date:  07-06-2021

    Language(s): 

    Published date:  12-01-2013

    Publisher:  Semiconductor Equipment & Materials Institute

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    Abstract - (Show below) - (Hide below)

    Specifies considerations to the manufacturers of semiconductor manufacturing equipment that will assist them in assessing and mitigating the risk to equipment and product associated with fire and combustion by-products.

    General Product Information - (Show below) - (Hide below)

    Development Note Not available for sale from ILI, customer to contact SEMI. (05/2001)
    Document Type Standard
    Publisher Semiconductor Equipment & Materials Institute
    Status Superseded
    Superseded By

    Standards Referenced By This Book - (Show below) - (Hide below)

    NFPA 318 : 2018 PROTECTION OF SEMICONDUCTOR FABRICATION FACILITIES
    IPC HDBK 830 : A GUIDELINES FOR DESIGN, SELECTION AND APPLICATION OF CONFORMAL COATINGS
    SEMI S10 : 2015E SAFETY GUIDELINE FOR RISK ASSESSMENT AND RISK EVALUATION PROCESS
    SEMI S6 : 2007E EHS GUIDELINE FOR EXHAUST VENTILATION OF SEMICONDUCTOR MANUFACTURING EQUIPMENT
    SEMI S2 : 2016B ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
    SEMI S18 : 2012 ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SILANE FLAMMABLE SILICON COMPOUNDS
    SEMI S7 : 2015 SAFETY GUIDELINE FOR EVALUATION PERSONNEL AND EVALUATING COMPANY QUALIFICATIONS
    SEMI S13 : 2013 ENVIRONMENTAL, HEALTH AND SAFETY GUIDELINE FOR DOCUMENTS PROVIDED TO THE EQUIPMENT USER FOR USE WITH MANUFACTURING EQUIPMENT
    SEMI S3 : 2011(R2017)E SAFETY GUIDELINE FOR PROCESS LIQUID HEATING SYSTEMS
    SEMI S26 : 2016 ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR FPD MANUFACTURING SYSTEM
    SEMI S22 : 2015BE Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment

    Standards Referencing This Book - (Show below) - (Hide below)

    SEMI S7 : 2015 SAFETY GUIDELINE FOR EVALUATION PERSONNEL AND EVALUATING COMPANY QUALIFICATIONS
    SEMI E10 : 2014E SPECIFICATION FOR DEFINITION AND MEASUREMENT OF EQUIPMENT RELIABILITY, AVAILABILITY, AND MAINTAINABILITY (RAM) AND UTILIZATION
    SEMI S2 : 2016B ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
    SEMI S10 : 2015E SAFETY GUIDELINE FOR RISK ASSESSMENT AND RISK EVALUATION PROCESS
    SEMI E70 : 2013 GUIDE FOR TOOL ACCOMMODATION PROCESS
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