UNI EN ISO 14644-9 : 2012

Superseded

Superseded A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 9: CLASSIFICATION OF SURFACE CLEANLINESS BY PARTICLE CONCENTRATION

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Superseded date: 22-07-2013

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Published date: 31-12-2011

Publisher: Ente Nazionale Italiano di Unificazione (UNI)

Table of Contents - (Show below) - (Hide below)

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Abbreviated terms
5 Classification system
6 Demonstration of compliance
Annex A (informative) - Surface characteristics
Annex B (informative) - Descriptor for specific particle
        size ranges
Annex C (informative) - Parameters influencing the
        SCP classification
Annex D (informative) - Measurement methods for
        determining surface cleanliness by particle
        concentration
Bibliography

Abstract - (Show below) - (Hide below)

Describes the classification of cleanliness levels on solid surfaces by particle concentration in cleanrooms and associated controlled environment applications.

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Document Type	Standard
ISBN
Pages
Published
Publisher	Ente Nazionale Italiano di Unificazione (UNI)
Status	Superseded
Superseded By	UNI EN ISO 14644-9:2022

International Equivalents – Equivalent Standard(s) & Relationship - (Show below) - (Hide below)

Equivalent Standard(s)	Relationship
EN ISO 14644-9:2012	Identical
ISO 14644-9:2012	Identical

Standards Referencing This Book - (Show below) - (Hide below)

SEMI E78 : 2012	GUIDE TO ASSESS AND CONTROL ELECTROSTATIC DISCHARGE (ESD) AND ELECTROSTATIC ATTRACTION (ESA) FOR EQUIPMENT
ISO 14644-6:2007	Cleanrooms and associated controlled environments Part 6: Vocabulary
ISO 4287:1997	Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters
ISO 10015:1999	Quality management Guidelines for training
ISO 16232-3:2007	Road vehicles Cleanliness of components of fluid circuits Part 3: Method of extraction of contaminants by pressure rinsing
IEC 61340-5-1:2016	Electrostatics - Part 5-1: Protection of electronic devices from electrostatic phenomena - General requirements
ISO 16232-2:2007	Road vehicles Cleanliness of components of fluid circuits Part 2: Method of extraction of contaminants by agitation
ISO 16232-5:2007	Road vehicles Cleanliness of components of fluid circuits Part 5: Method of extraction of contaminants on functional test bench
ISO 16232-4:2007	Road vehicles Cleanliness of components of fluid circuits Part 4: Method of extraction of contaminants by ultrasonic techniques
ISO 10576-1:2003	Statistical methods — Guidelines for the evaluation of conformity with specified requirements — Part 1: General principles
SEMI E43 : 2013	RECOMMENDED PRACTICE FOR ELETROSTATIC MEASUREMENTS ON OBJECTS AND SURFACES
IEST RP CC022.2 : 2004(R2008)	ELECTROSTATIC CHARGE IN CLEANROOMS AND OTHER CONTROLLED ENVIRONMENTS
ISO/TS 21748:2004	Guidance for the use of repeatability, reproducibility and trueness estimates in measurement uncertainty estimation
CLC/TR 61340-5-2:2008	Electrostatics - Part 5-2: Protection of electronic devices from electrostatic phenomena - User guide
IEST STD CC1246 : 2013	PRODUCT CLEANLINESS LEVELS - APPLICATIONS, REQUIREMENTS, AND DETERMINATION
ISO 5725-2:1994	Accuracy (trueness and precision) of measurement methods and results Part 2: Basic method for the determination of repeatability and reproducibility of a standard measurement method

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