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  • UNI EN ISO 25178-604 : 2013

    Current The latest, up-to-date edition.

    GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: AREAL - PART 604: NOMINAL CHARACTERISTICS OF NON-CONTACT (COHERENCE SCANNING INTERFEROMETRY) INSTRUMENTS

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    Published date:  03-10-2013

    Publisher:  Ente Nazionale Italiano di Unificazione (UNI)

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    Table of Contents - (Show below) - (Hide below)

    Foreword
    Introduction
    1 Scope
    2 Terms and definitions
    3 Descriptions of the influence quantities
    Annex A (informative) - Overview and components
            of a coherence scanning interferometry
            (CSI) microscope
    Annex B (informative) - Coherence scanning interferometry
            (CSI) theory of operation
    Annex C (informative) - Spatial resolution
    Annex D (informative) - Example procedure for estimating
            surface topography repeatability
    Annex E (informative) - Relation to the GPS matrix model
    Bibliography

    Abstract - (Show below) - (Hide below)

    Defines the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.

    General Product Information - (Show below) - (Hide below)

    Committee CT 47
    Document Type Standard
    Publisher Ente Nazionale Italiano di Unificazione (UNI)
    Status Current

    Standards Referencing This Book - (Show below) - (Hide below)

    ISO/TR 14638:1995 Geometrical product specification (GPS) Masterplan
    ISO 8015:2011 Geometrical product specifications (GPS) Fundamentals Concepts, principles and rules
    ISO 4287:1997 Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters
    ISO 14978:2006 Geometrical product specifications (GPS) General concepts and requirements for GPS measuring equipment
    ISO 25178-6:2010 Geometrical product specifications (GPS) Surface texture: Areal Part 6: Classification of methods for measuring surface texture
    ISO 10934-2:2007 Optics and optical instruments Vocabulary for microscopy Part 2: Advanced techniques in light microscopy
    ISO 14253-1:2017 Geometrical product specifications (GPS) — Inspection by measurement of workpieces and measuring equipment — Part 1: Decision rules for verifying conformity or nonconformity with specifications
    ISO 25178-603:2013 Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
    ISO 25178-3:2012 Geometrical product specifications (GPS) — Surface texture: Areal — Part 3: Specification operators
    ISO/IEC Guide 99:2007 International vocabulary of metrology Basic and general concepts and associated terms (VIM)
    ISO 3274:1996 Geometrical Product Specifications (GPS) — Surface texture: Profile method — Nominal characteristics of contact (stylus) instruments
    VDI/VDE 2655 Blatt 1.1:2008-03 Optical measurement and microtopographies - Calibration of interference microscopes and depth measurement standards for roughness measurement
    ISO 9334:2007 Optics and photonics Optical transfer function Definitions and mathematical relationships
    ISO 25178-601:2010 Geometrical product specifications (GPS) — Surface texture: Areal — Part 601: Nominal characteristics of contact (stylus) instruments
    ISO 25178-602:2010 Geometrical product specifications (GPS) — Surface texture: Areal — Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments
    ISO 25178-2:2012 Geometrical product specifications (GPS) Surface texture: Areal Part 2: Terms, definitions and surface texture parameters
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