• VDI 2083 Blatt 13.2:2009-01

    Current The latest, up-to-date edition.

    Cleanroom technology - Quality, production and distribution of ultrapure water - Microelectronics and other technical applications

    Available format(s):  Hardcopy, PDF

    Language(s):  German - English

    Published date:  01-01-2009

    Publisher:  Verlag des Vereins Deutscher Ingenieure

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    Table of Contents - (Show below) - (Hide below)

    Preliminary note
    Introduction
    1. Scope
    2. Normative references
    3. Terms and definitions
    4. Raw water
    5. Basic operations of ultrapure-water production
    6. Specification of ultrapure water for the
        microelectronics industry
    7. Typical plant layouts (including materials and
        components)
    8. Ultrapure-water distribution
    9. Installation, commissioning and acceptance
    10. Project handling and documentation
    11. Operation and quality monitoring
    12. Reuse
    Bibliography
    Index

    Abstract - (Show below) - (Hide below)

    This guideline aims to compile the existing expertise regarding the planning, construction, operation and monitoring of water-processing installations for the production of ultrapure water.

    General Product Information - (Show below) - (Hide below)

    Document Type Standard
    Publisher Verlag des Vereins Deutscher Ingenieure
    Status Current
    Supersedes

    Standards Referenced By This Book - (Show below) - (Hide below)

    VDI 2083 Blatt 17:2013-06 Cleanroom technology - Compatibility of materials with the required cleanliness
    VDI 2083 Blatt 3.1:2012-06 Cleanroom technology - Metrology in cleanroom air - Monitoring
    VDI 2083 Blatt 13.3:2010-10 Cleanroom technology - Quality, production, and distribution of ultrapure water - Pharmacy and other life-science applications
    VDI 2083 Blatt 8.1:2014-10 Cleanroom technology - Air cleanliness chemical concentration (ACC)
    VDI 2083 Blatt 1:2013-01 Cleanroom technology - Particulate air cleanliness classes
    VDI 2083 Blatt 4.2:2011-04 Cleanroom technology - Energy efficiency
    VDI 2083 Blatt 13.1:2009-01 Cleanroom technology - Quality, production and distribution of ultrapure water - Fundamentals
    VDI 2083 Blatt 16.1:2010-08 Cleanroom technology - Barier systems (isolators, mini-environments, separative devices) - Effectiveness and certification
    VDI 2083 Blatt 7:2015-10 Cleanroom technology - Ultrapure media - Quality, supply, distribution

    Standards Referencing This Book - (Show below) - (Hide below)

    EN ISO 6520-1:2007 Welding and allied processes - Classification of geometric imperfections in metallic materials - Part 1: Fusion welding (ISO 6520-1:2007)
    EN ISO 5817:2014 Welding - Fusion-welded joints in steel, nickel, titanium and their alloys (beam welding excluded) - Quality levels for imperfections (ISO 5817:2014)
    DIN EN ISO 14644-1:2016-06 CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 1: CLASSIFICATION OF AIR CLEANLINESS BY PARTICLE CONCENTRATION (ISO 14644-1:2015)
    DIN 11850:2009-02 STAINLESS STEEL TUBES FOR THE FOOD AND CHEMICAL INDUSTRIES - DIMENSIONS, MATERIALS
    DIN 4046:1983-09 WATER-SUPPLY - TERMS - DVGW CODE OF PRACTICE
    VDI 2083 Blatt 11:2008-01 Cleanroom technology - Quality assurance
    DIN 25416-2:1983-01 FACILITIES FOR TREATMENT FOR RADIOACTIVE CONTAMINATED WATER IN NUCLEAR POWER PLANTS - METHODS
    DIN 11864-1:2016-10 (Draft) STAINLESS STEEL COMPONENTS FOR ASEPTIC APPLICATIONS IN THE CHEMICAL AND THE PHARMACEUTICAL INDUSTRIES - PART 1: CONNECTIONS
    ISO 6520-1:2007 Welding and allied processes Classification of geometric imperfections in metallic materials Part 1: Fusion welding
    ISO 14160:2011 Sterilization of health care products Liquid chemical sterilizing agents for single-use medical devices utilizing animal tissues and their derivatives Requirements for characterization, development, validation and routine control of a sterilization process for medical devices
    EN 12829:2011 Surface active agents - Preparation of water with known calcium and magnesium hardness
    DIN 1314:1977-02 PRESSURE; BASIC CONCEPTS, UNITS
    VDI 2083 Blatt 3:2005-07 Cleanroom technology - Metrology and test methods
    VDI 2083 Blatt 1:2013-01 Cleanroom technology - Particulate air cleanliness classes
    EN ISO 7027 : 1999 WATER QUALITY - DETERMINATION OF TURBIDITY
    SEMI E75 : 1998 PROVISIONAL MECHANICAL SPECIFICATION FOR BOX/POD COMPATIBLE CASSETTES USED TO TRANSPORT AND STORE 300-MM WAFERS
    VDI 2083 Blatt 10:1998-02 Cleanroom technology - High-Purity/Ultra-High-Purity (HP-/UHP-)media supply systems
    DIN EN ISO 17664:2016-06 (Draft) PROCESSING OF HEALTH CARE PRODUCTS - INFORMATION TO BE PROVIDED BY THE MEDICAL DEVICE MANUFACTURER FOR THE PROCESSING OF MEDICAL DEVICES (ISO 17664:2017)
    DIN 54400:2015-05 ION EXCHANGE - TERMINOLOGY
    ISO 2174:1990 Surface active agents Preparation of water with known calcium hardness
    ISO 14644-5:2004 Cleanrooms and associated controlled environments — Part 5: Operations
    EN 14743:2005+A1:2007 Water conditioning equipment inside buildings - Softeners - Requirements for performance, safety and testing
    VDI 2083 Blatt 12:2000-01 Cleanroom technology - Safety and environmental aspects
    VDI 2083 Blatt 13.1:2009-01 Cleanroom technology - Quality, production and distribution of ultrapure water - Fundamentals
    DIN EN 12829:2011-07 Surface active agents - Preparation of water with known calcium and magnesium hardness
    EN 1717:2000 Protection against pollution of potable water in water installations and general requirements of devices to prevent pollution by backflow
    EN ISO 4833 : 2003 MICROBIOLOGY OF FOOD AND ANIMAL FEEDING STUFFS - HORIZONTAL METHOD FOR THE ENUMERATION OF MICROORGANISMS - COLONY-COUNT TECHNIQUE AT 30 DEGREE C
    VDI 2083 Blatt 4.1:2006-10 Cleanroom technology - Planning, construction and start-up of cleanrooms
    VDI 2083 Blatt 15:2007-04 Cleanroom technology - Personnel at the clean work place
    ISO 10931:2005 Plastics piping systems for industrial applications Poly(vinylidene fluoride) (PVDF) Specifications for components and the system
    DIN 11864-2:2016-10 (Draft) STAINLESS STEEL COMPONENTS FOR ASEPTIC APPLICATIONS IN THE CHEMICAL AND THE PHARMACEUTICAL INDUSTRIES - PART 2: FLANGE CONNECTIONS
    DIN 38404-3:2005-07 German standard methods for the examination of water, waste water and sludge - Physical and physical-chemical parameters (group C) - Part 3: Determination of spectral absorption in the UV range, spectral absorption coefficient (C 3)
    SEMI E49.3 : 1998 GUIDE FOR ULTRAHIGH PURITY DEIONIZED WATER AND CHEMICAL DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING EQUIPMENT
    DIN EN 14743:2007-09 WATER CONDITIONING EQUIPMENT INSIDE BUILDINGS - SOFTENERS - REQUIREMENTS FOR PERFORMANCE, SAFETY AND TESTING
    VDI 1000:2017-02 VDI Standardisation Work - Principles and procedures
    EN 13098:2000 Workplace atmosphere - Guidelines for measurement of airborne micro-organisms and endotoxin
    DIN EN 10204:2005-01 Metallic products - Types of inspection documents; German version EN 10204:2004
    DIN 32736:2000-08 Building Management - Definitions and scope of services
    DIN 32676:2009-05 Fittings for the food, chemical and pharmaceutical industries - Clamp connections for stainless steel tubes - Weld-on type
    EN ISO 14644-5:2004 Cleanrooms and associated controlled environments - Part 5: Operations (ISO 14644-5:2004)
    EN 14652:2005+A1:2007 Water conditioning equipment inside buildings - Membrane separation devices - Requirements for performance, safety and testing
    VDI 2083 Blatt 5.1:2007-09 Cleanroom technology - Cleanroom operation
    DIN EN ISO 7027:2000-04 WATER QUALITY - DETERMINATION OF TURBIDITY
    EN 10204:2004 Metallic products - Types of inspection documents
    ISO 14644-1:2015 Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
    VDI 2083 Blatt 7:2015-10 Cleanroom technology - Ultrapure media - Quality, supply, distribution
    DIN 38404-10:2012-12 GERMAN STANDARD METHODS FOR THE EXAMINATION OF WATER, WASTE WATER AND SLUDGE - PHYSICAL AND PHYSICO-CHEMICAL PARAMETERS (GROUP C) - PART 10: CALCULATION OF THE CALCIT SATURATION OF WATER (C 10)
    DIN EN ISO 14160:2011-10 Sterilization of health care products - Liquid chemical sterilizing agents for single-use medical devices utilizing animal tissues and their derivatives - Requirements for characterization, development, validation and routine control of a sterilization process for medical devices (ISO 14160:2011)
    VDI 2083 Blatt 9:1991-09 (Draft) Clean room engineering; quality, production and distribution of superpurity water
    VDI 2083 Blatt 5.2:2008-10 Cleanroom technology - Cleanroom operation - Decontamination of multiple-use cleanroom clothing
    EN 1418:1997 Welding personnel - Approval testing of welding operators for fusion welding and resistance weld setters for fully mechanized and automatic welding of metallic materials
    EN ISO 10931:2005/A1:2015 Plastics piping systems for industrial applications - Poly(vinylidene fluoride) (PVDF) - Specifications for components and the system (ISO 10931:2005/FDAM 1:2015)
    DIN EN ISO 10931:2015-11 PLASTICS PIPING SYSTEMS FOR INDUSTRIAL APPLICATIONS - POLY(VINYLIDENE FLUORIDE) (PVDF) - SPECIFICATIONS FOR COMPONENTS AND THE SYSTEM (ISO 10931:2005 + AMD 1:2015)
    EN ISO 14644-1:2015 Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration (ISO 14644-1:2015)
    ISO 17664:2017 Processing of health care products Information to be provided by the medical device manufacturer for the processing of medical devices
    EN ISO 14160:2011 Sterilization of health care products - Liquid chemical sterilizing agents for single-use medical devices utilizing animal tissues and their derivatives - Requirements for characterization, development, validation and routine control of a sterilization process for medical devices (ISO 14160:2011)
    DIN EN 1717:2011-08 Protection against pollution of potable water installations and general requirements of devices to prevent pollution by backflow
    ISO 7027:1999 Water quality Determination of turbidity
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