• VDI 2083 Blatt 9.1:2006-12

    Superseded A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

    Clean room technology - Compatibility with required cleanliness and surface cleanliness

    Available format(s):  Hardcopy, PDF

    Superseded date:  04-01-2021

    Language(s):  German - English

    Published date:  01-12-2006

    Publisher:  Verlag des Vereins Deutscher Ingenieure

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    Table of Contents - (Show below) - (Hide below)

    Preliminary note
    Introduction
    1 Scope
    2 Normative references
    3 Terms and definitions
    4 Classification
    5 Requirements
    6 Procedure for testing and
    acceptance, metrology
    7 Documentation
    Annex A - Case study illustrating the
              procedure for reducing the number of
              measuring points
              (representative inference)
    Annex B - Example of calculation for determining
              the cleanroom compatibility deriving
              from measurements
    Annex C - Methods for determining the
              compatibility with the required
              cleanliness
    Annex D - Indirect method for determining the
              challenge to the cleanroom (holistic
              method)
    Annex E - Special tests for surface cleanliness
              and compatibility with the required
              cleanliness for the cleanroom trades
    Bibliography

    Abstract - (Show below) - (Hide below)

    Provides guidance in the planning, creating, maintaining, restoring and demonstrating of the required compatibility of equipment and air-handling components with the required cleanliness in controlled environments as per VDI 2083 Part 1 and ISO 14644-1.

    General Product Information - (Show below) - (Hide below)

    Development Note Supersedes VDI 2083-4 and VDI 2083-8. (12/2007)
    Document Type Standard
    Publisher Verlag des Vereins Deutscher Ingenieure
    Status Superseded
    Superseded By
    Supersedes

    Standards Referenced By This Book - (Show below) - (Hide below)

    VDI 2083 Blatt 4:1996-02 Cleanroom technology - Surface cleanliness
    UNE-EN ISO 14644-14:2017 Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2016)
    EN ISO 14644-14:2016 Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2016)
    EN ISO 14644-15:2017 Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (ISO 14644-15:2017)
    VDI 2083 Blatt 18:2012-01 Cleanroom technology - Biocontamination control
    VDI 2083 Blatt 17:2013-06 Cleanroom technology - Compatibility of materials with the required cleanliness
    VDI 2083 Blatt 15:2007-04 Cleanroom technology - Personnel at the clean work place
    VDI 2083 Blatt 13.3:2010-10 Cleanroom technology - Quality, production, and distribution of ultrapure water - Pharmacy and other life-science applications
    BS EN ISO 14644-15:2017 Cleanrooms and associated controlled environments Assessment of suitability for use of equipment and materials by airborne chemical concentration
    VDI 2083 Blatt 9.2:2017-01 Cleanroom technology - Consumables in the cleanroom
    VDI 2083 Blatt 8.1:2014-10 Cleanroom technology - Air cleanliness chemical concentration (ACC)
    ISO 14644-15:2017 Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration
    VDI 2083 Blatt 1:2013-01 Cleanroom technology - Particulate air cleanliness classes
    BS EN ISO 14644-14:2016 ENISO 14644-14 environments — Assessment of suitability of equipment and materials for cleanrooms Assessment of suitability for use of equipment by airborne particle concentration
    ISO 14644-14:2016 Cleanrooms and associated controlled environments Part 14: Assessment of suitability for use of equipment by airborne particle concentration
    VDI 2083 Blatt 16.1:2010-08 Cleanroom technology - Barier systems (isolators, mini-environments, separative devices) - Effectiveness and certification

    Standards Referencing This Book - (Show below) - (Hide below)

    EN ISO 14644-4:2001 Cleanrooms and associated controlled environments - Part 4: Design, construction and start-up (ISO 14644-4:2001)
    EN ISO 4287:1998/A1:2009 GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - TERMS, DEFINITIONS AND SURFACE TEXTURE PARAMETERS
    ISO 9241-5:1998 Ergonomic requirements for office work with visual display terminals (VDTs) — Part 5: Workstation layout and postural requirements
    ISO 4287:1997 Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters
    EN 61340-5-1:2016/AC:2017-05 ELECTROSTATICS - PART 5-1: PROTECTION OF ELECTRONIC DEVICES FROM ELECTROSTATIC PHENOMENA - GENERAL REQUIREMENTS (IEC 61340-5-1:2016/COR1:2017)
    VDI 2083 Blatt 3:2005-07 Cleanroom technology - Metrology and test methods
    DIN EN 1335-2:2016-09 (Draft) OFFICE FURNITURE - OFFICE WORK CHAIR - PART 2: SAFETY REQUIREMENTS
    IEC 61340-5-1:2016 Electrostatics - Part 5-1: Protection of electronic devices from electrostatic phenomena - General requirements
    VDI 2083 Blatt 10:1998-02 Cleanroom technology - High-Purity/Ultra-High-Purity (HP-/UHP-)media supply systems
    EN 1335-3:2009/AC:2009 OFFICE FURNITURE - OFFICE WORK CHAIR - PART 3: TEST METHODS
    DIN EN 61340-5-2 : 2002 ELECTROSTATICS - PART 5-2: PROTECTION OF ELECTRONIC DEVICES FROM ELECTROSTATIC PHENOMENA; USER GUIDE
    DIN EN 1335-1:2002-08 OFFICE FURNITURE - OFFICE WORK CHAIR - PART 1: DIMENSIONS - DETERMINATION OF DIMENSIONS
    EN ISO 8785 : 1999 GEOMETRICAL PRODUCT SPECIFICATION (GPS) - SURFACE IMPERFECTIONS - TERMS, DEFINITIONS AND PARAMETERS
    DIN EN ISO 9241-5:1999-08 ERGONOMIC REQUIREMENTS FOR OFFICE WORK WITH VISUAL DISPLAY TERMINALS (VDTS) - PART 5: WORKSTATION LAYOUT AND POSTURAL REQUIREMENTS
    DIN EN ISO 14644-4:2003-06 Cleanrooms and associated controlled environments - Part 4: Design, construction and start up (ISO 14644-4:2001)
    VDI 2815 Blatt 5:1978-05 Terms of production engineering and control; manufacturing accessories
    SEMI E14 : 1993 MEASUREMENT OF PARTICLE CONTAMINATION CONTRIBUTED TO THE PRODUCT FROM THE PROCESS OR SUPPORT TOOL
    DIN 55301:1978-09 PRESENTATION OF STATISTICAL TABLES
    PREN ISO 14644-8 : DRAFT 2011 CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 8: CLASSIFICATION OF AIR CLEANLINESS BY CHEMICAL CONCENTRATION (ISO/DIS 14644-8:2011)
    DIN EN 61340-5-1 : 2017 ELECTROSTATICS - PART 5-1: PROTECTION OF ELECTRONIC DEVICES FROM ELECTROSTATIC PHENOMENA - GENERAL REQUIREMENTS (IEC 61340-5-1:2016)
    DIN EN 1081:1998-04 RESILIENT FLOOR COVERINGS - DETERMINATION OF THE ELECTRICAL RESISTANCE
    VDI 3489 Blatt 3:1997-03 Particulate matter measurement - Methods of characterizing and monitoring test aerosols - Optical particle counter
    ASTM G 99 : 2017 : REDLINE Standard Test Method for Wear Testing with a Pin-on-Disk Apparatus
    ISO 14644-7:2004 Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
    EN 1335-1 : 2000 COR 2002 OFFICE FURNITURE - OFFICE WORK CHAIR - PART 1: DIMENSIONS - DETERMINATION OF DIMENSIONS
    VDI 2083 Blatt 7:2015-10 Cleanroom technology - Ultrapure media - Quality, supply, distribution
    ISO 8785:1998 Geometrical Product Specification (GPS) — Surface imperfections — Terms, definitions and parameters
    EN 1335-2:2009 Office furniture - Office work chair - Part 2: Safety requirements
    ISO 14644-4:2001 Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up
    EN 61340-5-2:2001/corrigendum:2001 ELECTROSTATICS - PART 5-2: PROTECTION OF ELECTRONIC DEVICES FROM ELECTROSTATIC PHENOMENA - USER GUIDE
    EN 13779:2007 Ventilation for non-residential buildings - Performance requirements for ventilation and room-conditioning systems
    VDI 2083 Blatt 9:1991-09 (Draft) Clean room engineering; quality, production and distribution of superpurity water
    EN 1081:1998 Resilient floor coverings - Determination of the electrical resistance
    DIN 50452-1:1995-11 TESTING OF MATERIALS FOR SEMICONDUCTOR TECHNOLOGY - TEST METHOD FOR PARTICLE ANALYSIS IN LIQUIDS - PART 1: MICROSCOPIC DETERMINATION OF PARTICLES
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