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Cleanroom technology - Compatibility with required cleanliness and surface cleanliness
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Available format(s): Hardcopy, PDF
Language(s): German - English
Published date: 01-01-2021
Publisher: Verlag des Vereins Deutscher Ingenieure
This standard essentially deals with particulate contamination. Chemical (molecular), biological and radiological surface contamination is not a specific issue in this standard; the same holds true for process media.
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