• BS ISO 27894:2009

    Current The latest, up-to-date edition.

    Vacuum technology. Vacuum gauges. Specifications for hot cathode ionization gauges

    Available format(s):  Hardcopy, PDF

    Language(s):  English

    Published date:  31-03-2010

    Publisher:  British Standards Institution

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    Table of Contents - (Show below) - (Hide below)

    Foreword
    Introduction
    1 Scope
    2 Normative references
    3 Terms and definitions
    4 Symbols and abbreviated terms
    5 Principle of hot cathode ionization gauge
    6 Specifications for hot cathode ionization gauge to be
      provided by manufacturers
    7 Additional (optional) specifications for hot cathode
      ionization gauge to be provided by manufacturers
    8 Influences contributing to the measurement uncertainty
      with hot cathode ionization gauges
    Annex A (informative) - Typical Bayard-Alpert gauge with a
            glass envelope
    Annex B (informative) - Typical electrical connection of a
            Bayard-Alpert gauge
    Annex C (informative) - Problems with ionization gauges
    Bibliography

    Abstract - (Show below) - (Hide below)

    Describes terms relating to hot cathode ionization vacuum gauges, and specifies which parameters are given by manufacturers of hot cathode ionization gauges and which measurement uncertainties have to be considered when operating these gauges.

    Scope - (Show below) - (Hide below)

    This International Standard defines terms relating to hot cathode ionization vacuum gauges, and specifies which parameters are given by manufacturers of hot cathode ionization gauges and which measurement uncertainties have to be considered when operating these gauges. The reasons for this are as follows. This International Standard updates some terms and definitions given in ISO3529-3:1981. This International Standard specifies information for suitable laboratories to correctly calibrate vacuum gauges under high and ultra-high vacua, since ionization gauges with hot cathodes are often used as reference standards. This information consists of the relevant parameters and characteristics suitable for quotation in manufacturers\' instructions to users employing ionization gauges for traceable measurement of pressure under high or ultra-high vacua. This International Standard also lists those uncertainties associated with the measurement of pressure by the ionization gauge, which are known to be significant, and gives guidelines on how to evaluate them. It is possible that the list is not comprehensive for some current or future vacuum gauges. This International Standard complements ISO/TS3567 and ISO/TS27893 when using ionization gauges as reference standards.

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    Committee MCE/8/-/4
    Development Note Supersedes 08/30182096 DC. (04/2010)
    Document Type Standard
    Publisher British Standards Institution
    Status Current
    Supersedes

    Standards Referencing This Book - (Show below) - (Hide below)

    ISO/TS 27893:2009 Vacuum technology Vacuum gauges Evaluation of the uncertainties of results of calibrations by direct comparison with a reference gauge
    ISO 3529-3:2014 Vacuum technology Vocabulary Part 3: Total and partial pressure vacuum gauges
    ISO/TS 3567:2005 Vacuum gauges Calibration by direct comparison with a reference gauge
    ISO/IEC Guide 99:2007 International vocabulary of metrology Basic and general concepts and associated terms (VIM)
    ISO/IEC Guide 98-3:2008 Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995)
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