Foreword
1 Scope
2 Normative references
3 Principle
4 Apparatus
5 Adjusting the glow-discharge spectrometer system
settings
6 Sampling
7 Calibration
8 Analysis of test specimens
9 Expression of results
10 Precision
11 Test report
Annex A (normative) - Calculation of calibration constants
and quantitative evaluation of depth profiles
Annex B (informative) - Suggested spectral lines for
determination of given elements
Annex C (informative) - Examples of oxide density and the
corresponding quantity rho[o]
Annex D (informative) - Report on interlaboratory testing
of metal oxide films
Bibliography