Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Descriptions of the influence quantities
Annex A (informative) - General principles
Annex B (informative) - Spot size and focal
shift
Annex C (informative) - Beam offset direction
and maximum acceptable local slope
Annex D (informative) - Features of an areal surface
texture measuring instrument
Annex E (informative) - Others: Non-measured point
(autofocus error)
Annex F (informative) - Relation to the GPS matrix
Bibliography