Foreword
1 Scope
2 Normative references
3 Principle
4 Apparatus
4.1 Glow discharge optical emission spectrometer
4.2 Data acquisition
5 Sampling
6 Procedure
6.1 Selection of spectral lines
6.2 Optimising the glow discharge spectrometer settings
6.3 Calibration
7 Verification of the analytical accuracy
8 Expression of results
8.1 Method of calculation
8.2 Precision
9 Test report
Annex A (normative) Calculation of calibration constants and
quantitative evaluation of depth profiles
Bibliography