SEMI E30.2 : 1998
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
HANDLER EQUIPMENT SPECIFIC EQUIPMENT MODEL (HSEM)
01-03-2003
12-01-2013
Gives a Specific Equipment Model (SEM) for Handling equipment (HSEM). The SEM consists of equipment characteristics and behaviors that are applicable to this class of equipment and are required to be implemented in addition to the SEMI E30 fundamental requirements and additional capabilities. The intent of this document is to facilitate the integration of Handling equipment into an automated (semiconductor) factory.
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