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SEMI E30.5 : 2002(R2017)

SEMI E30.5 : 2002(R2017)

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

SPECIFICATION FOR METROLOGY SPECIFIC EQUIPMENT MODEL (MSEM)

Superseded date

19-05-2023

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Gives a Specific Equipment Model (SEM) for Metrology equipment (MSEM). The MSEM consists of equipment characteristics and behaviors that are applicable to this class of equipment and are required to be implemented in addition to the SEMI E30 fundamental requirements and additional capabilities.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (02/2007) No longer published within the SEMI E30 family of standards. Published and sold separately on its own page. (02/2009)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI E141 : 2005 GUIDE FOR SPECIFICATION OF ELLIPSOMETER EQUIPMENT FOR USE IN INTEGRATED METROLOGY
SEMI E127 : 2008 SPECIFICATION FOR INTEGRATED MEASUREMENT MODULE COMMUNICATIONS: CONCEPTS, BEHAVIOR, AND SERVICES (IMMC)

SEMI M20 : 2015 PRACTICE FOR ESTABLISHING A WAFER COORDINATE SYSTEM
SEMI E37.1 : 2002(R2013) HIGH-SPEED SECS MESSAGE SERVICES SINGLE SELECTED-SESSION MODE (HSMS-SS)
SEMI E58 : JUL 2003 AUTOMATED RELIABILITY, AVAILABILITY, AND MAINTAINABILITY STANDARD (ARAMS): CONCEPTS, BEHAVIOR, AND SERVICES

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