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  • SEMI E74 : 2001(R2007)

    Current The latest, up-to-date edition.

    SPECIFICATION FOR VACUUM PUMP INTERFACES - TURBOMOLECULAR PUMPS

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    Published date:  12-01-2013

    Publisher:  Semiconductor Equipment & Materials Institute

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    Abstract - (Show below) - (Hide below)

    Specifies the physical and electrical interfaces for turbo molecular pump (TMP) type vacuum pumps. Standardization of pump interfaces will allow for interchangeability of pumps. Device manufacturers use this standard when procuring processing equipment to specify to the equipment supplier the interface required for interchangeability of pumps.

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    Development Note Not available for sale from ILI, customer to contact SEMI. (05/2001) Also available in CD-ROM. (02/2007)
    Document Type Standard
    Publisher Semiconductor Equipment & Materials Institute
    Status Current

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