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SEMI E84 : 2009(R2017)

SEMI E84 : 2009(R2017)

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

SPECIFICATION FOR ENHANCED CARRIER HANDOFF PARALLEL I/O INTERFACE

Superseded date

05-09-2023

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes the capabilities of the parallel I/O interface defined in SEMI E23 in order to support improvements in the reliability and efficiency of carrier transfer.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI E88:2023 Specification for AMHS Storage SEM (Stocker SEM)
SEMI E109:2017(R2023) Specification for Reticle and Pod Management (RPMS)

SEMI E1-9 : NOV 2006E MECHANICAL SPECIFICATION FOR CASSETTES USED TO TRANSPORT AND STORE 300 MM WAFERS
SEMI E15-1 : 2005(R2010) SPECIFICATION FOR 300 MM TOOL LOAD PORT
SEMI E23 : 2004(R2010) SPECIFICATION FOR CASSETTE TRANSFER PARALLEL I/O INTERFACE
SEMI E47.1 : NOV 2006 MECHANICAL SPECIFICATION FOR FOUPS USED TO TRANSPORT AND STORE 300 MM WAFERS
SEMI E87 : 2017 SPECIFICATION FOR CARRIER MANAGEMENT (CMS)

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