• SEMI F14 : 1993(R1999)

    Current The latest, up-to-date edition.

    GUIDE FOR THE DESIGN OF GAS SOURCE EQUIPMENT ENCLOSURES

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    Published date:  12-01-2013

    Publisher:  Semiconductor Equipment & Materials Institute

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    Abstract - (Show below) - (Hide below)

    Defines gas source equipment enclosure design considerations. It is for use by purchasers and manufacturers. Modifications needed to facilitate specific gases, unusual applications or cylinders are not covered.

    General Product Information - (Show below) - (Hide below)

    Development Note Not available for sale from ILI, customer to contact SEMI. (05/2001)
    Document Type Standard
    Publisher Semiconductor Equipment & Materials Institute
    Status Current

    Standards Referenced By This Book - (Show below) - (Hide below)

    SEMI S2 : 2016B ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
    SEMI S26 : 2016 ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR FPD MANUFACTURING SYSTEM

    Standards Referencing This Book - (Show below) - (Hide below)

    SEMI S4 : 2004 SAFETY GUIDELINE FOR THE SEGREGATION/SEPARATION OF GAS CYLINDERS CONTAINED IN CABINETS
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