SEMI F50 : 2000(R2008)

Superseded

Superseded A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

GUIDE FOR ELECTRIC UTILITY VOLTAGE SAG PERFORMANCE FOR SEMICONDUCTOR FACTORIES

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Superseded date: 06-12-2021

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Published date: 12-01-2013

Publisher: Semiconductor Equipment & Materials Institute

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Provides a framework for semiconductor and flat panel display (FPD) manufacturers and their electric utility service providers to minimize the effect of voltage sag events on semiconductor processing.

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Development Note	Not available for sale from ILI, customer to contact SEMI. (05/2001) Also available in CD-ROM. (10/2008)
Document Type	Standard
ISBN
Pages
Published
Publisher	Semiconductor Equipment & Materials Institute
Status	Superseded

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SEMI S2 : 2016B	ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT

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