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CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 9: CLASSIFICATION OF SURFACE CLEANLINESS BY PARTICLE CONCENTRATION (ISO 14644-9:2012)
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Available format(s): Hardcopy
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Published date: 01-10-2012
Publisher: Swiss Standards
ISO 14644-9:2012 establishes the classification of cleanliness levels on solid surfaces by particle concentration in cleanrooms and associated controlled environment applications.
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