Foreword
Introduction
1 Scope
2 Normative references
3 Abbreviations
4 Terms and definitions
5 Specimen preparation for cross-sectional imaging
6 Determination of an interface position
7 Detailed Procedure for determining the
position of the Interface
8 Uncertainty of measurement result
9 Error accumulating from each step of the procedure
Annex A (informative) - Examples of processing to
the real TEM/STEM image of the three image type
Annex B (informative) - Two main applications for this method
Annex C (informative) - Calibration of scale unit:
pixel size calibration