ASTM F 1709 : 1997

Superseded

Superseded A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications

Available format(s): Hardcopy, PDF

Superseded date: 11-11-2014

Language(s): English

Published date: 01-01-1996

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CONTAINED IN VOL. 10.04, 2016 Defines pure titanium sputtering targets used as a raw material in fabricating semiconductor electronic devices.

1.1 This specification covers pure titanium sputtering targets used as a raw material in fabricating semiconductor electronic devices.

1.2 This standard sets purity grade levels, physical attributes, analytical methods, and packaging.

Committee	F 01
Document Type	Standard
ISBN
Pages
Product Note	Reconfirmed 1997
Published
Publisher	American Society for Testing and Materials
Status	Superseded
Superseded By	ASTM F 1709 : 1997 : R2002

ASTM F 3166 : 2016	Standard Specification for High-Purity Titanium Sputtering Target Used for Through-Silicon Vias (TSV) Metallization (Withdrawn 2023)

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Committee	F 01
Document Type	Standard
ISBN
Pages
Product Note	Reconfirmed 1997
Published
Publisher	American Society for Testing and Materials
Status	Superseded
Superseded By	ASTM F 1709 : 1997 : R2002

ASTM F 3166 : 2016	Standard Specification for High-Purity Titanium Sputtering Target Used for Through-Silicon Vias (TSV) Metallization (Withdrawn 2023)