ÖNORM EN ISO 14644-10:2022-10-15
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Current
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Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination (ISO 14644-10:2022)
Published date
15-10-2022
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This document establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles).
| Committee |
ISO/TC 209
|
| DocumentType |
Standard
|
| PublisherName |
Osterreichisches Normungsinstitut/Austrian Standards
|
| Status |
Current
|
| Supersedes |
| Standards | Relationship |
| ISO 14644-10:2022 | Identical |
| EN ISO 14644-10:2022 | Identical |
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