ÖNORM EN ISO 14644-9:2022 11 01
Current
Current
The latest, up-to-date edition.
Cleanrooms and associated controlled environments - Part 9: Assessment of surface cleanliness for particle concentration (ISO 14644-9:2022)
Available format(s)
Hardcopy
Language(s)
German - English
Published date
01-11-2022
€122.69
Excluding VAT
This document establishes a procedure for the assessment of particle cleanliness levels on solid surfaces in cleanrooms and associated controlled environment applications.
| Committee |
ISO/TC 209
|
| DocumentType |
Standard
|
| Pages |
36
|
| PublisherName |
Osterreichisches Normungsinstitut/Austrian Standards
|
| Status |
Current
|
| Supersedes |
| Standards | Relationship |
| ISO 14644-9:2022 | Identical |
| EN ISO 14644-9:2022 | Identical |
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