ÖNORM EN ISO 25178-603:2025 09 01
Current
Current
The latest, up-to-date edition.
Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments (ISO 25178-603:2025)
Available format(s)
Hardcopy
Language(s)
English
Published date
01-09-2025
€171.23
Excluding VAT
This document specifies the design and metrological characteristics of phase shifting interferometry (PSI) instruments for the areal measurement of surface topography.
| Committee |
ISO/TC 213
|
| DocumentType |
Standard
|
| Pages |
31
|
| PublisherName |
Osterreichisches Normungsinstitut/Austrian Standards
|
| Status |
Current
|
| Supersedes |
| Standards | Relationship |
| EN ISO 25178-603:2025 | Identical |
| ISO 25178-603:2025 | Identical |
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