08/30182096 DC : 0
Superseded
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BS ISO 27894 - VACUUM TECHNOLOGY - VACUUM GAUGES - SPECIFICATIONS FOR HOT CATHODE IONIZATION GAUGES
Hardcopy , PDF
31-03-2010
English
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 Principle
5.1 Principle of hot cathode ionization gauge
6 Definitions for hot cathode ionization gauges
6.1 Sensitivity (sensitivity coefficient)
6.2 Ionization sensitivity
6.3 Relative sensitivity factor
6.4 Correction factor
6.5 Relative correction factor
6.6 Warm-up time
6.7 Residual current
6.8 Residual current equivalent pressure
6.9 Internal volume
7 Specifications for hot cathode ionization gauge to be
provided by manufacturers
7.1 Type of gauge
7.2 Display and measurement signal output
7.3 Measurement rang
7.4 Measurement uncertainty or accuracy
7.5 Residual current equivalent pressure
7.6 Fitting to chamber
7.7 Type of envelope
7.8 Maximum bake-out temperature
7.9 Filament material and emission current
7.10 Electrical operating condition
7.11 Interface
7.12 Compatibility between gauge tube and control unit
7.13 Dimension of gauge tube and controller
7.14 Nominal operating conditions
7.15 Input power of controller
7.16 Cable length
7.17 Replaceability of filament
7.18 Set point of press
7.19 Shut down pressure
7.20 Switch pressure
8 Additional (Optional) specifications for hot cathode ionization
gauge to be provided by manufacturers
8.1 Repeatability and reproducibility (long term stability)
8.2 Display range
8.3 Material of gauge tube
8.4 Degassing method
8.5 Degas power
8.6 Relative sensitivity factor for gas species other than
nitrogen
8.7 Typical sensitivity coefficient for nitrogen
8.8 Internal volume
8.9 Storage and transportation condition
8.10 Photographs
8.11 Inspection record and calibration certificate
9 Influences contributing to the measurement uncertainty with
hot cathode ionisation gauges
9.1 Emission current
9.2 Residual current
9.3 Resolution of signal output
9.4 Scatter of signal output and repeatability
9.5 Non-linearity of sensitivity coefficient
9.6 Environmental conditions
9.7 Prior usage, cleanliness
9.8 Reproducibilty (Long term stability) including transport
stability
9.9 Gas composition
9.10 Pumping effect
9.11 Thermal transpiration effect
9.12 Orientation of the gauge
9.13 Enclosure
Annex A (informative) Typical Bayard-Alpert gauge with glass
envelope
Annex B (informative) Typical electrical connection of a
Bayard-Alpert gauge
Annex C (informative) Problems with ionization gauges
Bibliography
| Committee |
MCE/8/-/4
|
| DocumentType |
Draft
|
| Pages |
24
|
| PublisherName |
British Standards Institution
|
| Status |
Superseded
|
| SupersededBy |
| ISO/TS 27893:2009 | Vacuum technology Vacuum gauges Evaluation of the uncertainties of results of calibrations by direct comparison with a reference gauge |
| ISO/IEC Guide 98:1993 | Guide to the expression of uncertainty in measurement (GUM) |
| ISO 3529-3:2014 | Vacuum technology — Vocabulary — Part 3: Total and partial pressure vacuum gauges |
| ISO/TS 3567:2005 | Vacuum gauges Calibration by direct comparison with a reference gauge |
| ISO 3753:1977 | Vacuum technology — Graphical symbols |
| ISO 3529-1:1981 | Vacuum technology — Vocabulary — Part 1: General terms |
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