10/30199169 DC : 0
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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BS ISO 12406 - SURFACE CHEMICAL ANALYSIS - SECONDARY ION MASS SPECTROMETRY - METHOD FOR DEPTH PROFILING OF ARSENIC IN SILICON
Hardcopy , PDF
30-11-2010
English
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Foreword
Introduction
1 Scope
2 Normative reference
3 Terms and definitions
4 Symbols and abbreviated terms
5 Principle
6 Reference materials
7 Apparatus
8 Specimen
9 Procedures
10 Expression of results
11 Test report
Annex A (informative) - Report of round robin test of
depth profiling of arsenic in silicon
Annex B (normative) - Procedures for the depth profiling
of NIST SRM 2134
Bibliography
| Committee |
CII/60
|
| DocumentType |
Draft
|
| Pages |
22
|
| PublisherName |
British Standards Institution
|
| Status |
Superseded
|
| SupersededBy |
| ISO 18114:2003 | Surface chemical analysis Secondary-ion mass spectrometry Determination of relative sensitivity factors from ion-implanted reference materials |
| ISO 14237:2010 | Surface chemical analysis Secondary-ion mass spectrometry Determination of boron atomic concentration in silicon using uniformly doped materials |
| ISO 18115:2001 | Surface chemical analysis Vocabulary |
| ISO 17560:2014 | Surface chemical analysis Secondary-ion mass spectrometry Method for depth profiling of boron in silicon |
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