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Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
BS IEC 62047-12 - SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 12: A METHOD FOR FATIGUE TESTING THIN FILM MATERIALS USING THE RESONANT VIBRATION OF A MEMS STRUCTURE
Hardcopy , PDF
30-11-2011
English
1 Scope
2 Normative references
3 Definitions
4 Test equipment
5 Specimen
6 Test conditions
7 Initial measurement
8 Test
9 Test Report
Annex A (Informative) - Testing using an electrostatic
device with an integrated actuation component
and displacement detection component
Annex B (Informative) - Testing using an external drive
and a device with an integrated strain gauge for
detecting displacement
Annex C (Informative) - Electromagnetic drive
out-of-plane vibration test (external drive
vibration test)
Annex D (Informative) - Theoretical expression on fatigue
life of brittle materials based on Paris' law and
Weibull distribution
Annex E (Informative) - Analysis examples
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