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Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

BS EN 62047-18 - SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 18: BENDING TEST METHODS OF THIN FILM MATERIALS

Available format(s)

Hardcopy , PDF

Superseded date

31-10-2013

Language(s)

English

FOREWORD
1 Scope
2 Normative references
3 Symbols and designations
4 Test Piece
5 Testing method
6 Test report
Annex A (Informative) - Precautions necessary for the
        specimen/substrate interface

BS EN 62047-18

Committee
EPL/47
DocumentType
Draft
Pages
13
PublisherName
British Standards Institution
Status
Superseded
SupersededBy

IEC 62047-2:2006 Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials
IEC 62047-6:2009 Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials

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€21.85
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