Foreword
1 Scope
2 Normative references
3 Principle
4 Apparatus
5 Adjusting the glow discharge spectrometer system settings
6 Sampling
7 Calibration
8 Analysis of test specimens
9 Expression of results
10 Precision
11 Test report
Annex A (normative) - Calculation of calibration constants
and quantitative evaluation of depth profiles
Annex B (informative) - Suggested spectral lines for
determination of given elements
Bibliography