Foreword
1 Scope
2 Normative references
3 Terms and definitions
4 Principle
5 Measuring apparatus
6 Preparation of s
7 Operation
8 Measurement
9 Calculation
10 Report
Annex A (informative) - Laser interferometer
Annex B (informative) - Temperature stability for homogeneity
measurements
Annex C (informative) - Measuring method using flatness
correction plates
Annex D (informative) - Flatness of the sample
Annex E (informative) - Method for obtaining PV value of
wavefront