14/30280736 DC : 0
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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BS EN ISO 14644-14 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 14 ASSESSMENT OF SUITABILITY FOR USE OF EQUIPMENT BY AIRBORNE PARTICLE CONCENTRATION
Hardcopy , PDF
English
31-10-2016
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 General outline of the assessment
5 Visual inspection
6 Assessment of suitability by airborne
particle concentration measurements
7 Documentation
8 Statement on cleanroom suitability
Annex A (informative) - Example for data processing
for determining the cleanroom suitability
deriving from measurements
Annex B (informative) - Additional tests as options
Bibliography
BS EN ISO 14644-14.
| Committee |
LBI/30
|
| DocumentType |
Draft
|
| Pages |
27
|
| PublisherName |
British Standards Institution
|
| Status |
Superseded
|
| SupersededBy |
| SAE AIR1167 | ENVIRONMENTAL CRITERIA AND TESTS FOR AEROSPACE GROUND EQUIPMENT IN SUPPORT OF SPACE SYSTEMS |
| ISO 14644-8:2013 | Cleanrooms and associated controlled environments — Part 8: Classification of air cleanliness by chemical concentration (ACC) |
| SEMI E49 : 2017 | GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY PIPING PERFORMANCE, SUBASSEMBLIES, AND FINAL ASSEMBLIES |
| ISO 8573-8:2004 | Compressed air — Part 8: Test methods for solid particle content by mass concentration |
| SEMI F70 : 2011(R2017) | TEST METHOD FOR DETERMINATION OF PARTICLE CONTRIBUTION OF GAS DELIVERY SYSTEM |
| ISO 14644-3:2005 | Cleanrooms and associated controlled environments — Part 3: Test methods |
| ISO 14644-1:2015 | Cleanrooms and associated controlled environments — Part 1: Classification of air cleanliness by particle concentration |
| ISO 14644-9:2012 | Cleanrooms and associated controlled environments — Part 9: Classification of surface cleanliness by particle concentration |
| SEMI F28 : 2003(R2015) | TEST METHOD FOR MEASURING PARTICLE GENERATION FROM PROCESS PANELS |
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