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  • 14/30280736 DC : 0

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    Superseded A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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    BS EN ISO 14644-14 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 14 ASSESSMENT OF SUITABILITY FOR USE OF EQUIPMENT BY AIRBORNE PARTICLE CONCENTRATION

    Available format(s):  Hardcopy, PDF

    Superseded date:  31-10-2016

    Language(s):  English

    Published date: 

    Publisher:  British Standards Institution

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    Table of Contents - (Show below) - (Hide below)

    Foreword
    Introduction
    1 Scope
    2 Normative references
    3 Terms and definitions
    4 General outline of the assessment
    5 Visual inspection
    6 Assessment of suitability by airborne
      particle concentration measurements
    7 Documentation
    8 Statement on cleanroom suitability
    Annex A (informative) - Example for data processing
            for determining the cleanroom suitability
            deriving from measurements
    Annex B (informative) - Additional tests as options
    Bibliography

    General Product Information - (Show below) - (Hide below)

    Comment Closes On
    Committee LBI/30
    Document Type Draft
    Publisher British Standards Institution
    Status Superseded
    Superseded By

    Standards Referencing This Book - (Show below) - (Hide below)

    IEST RP CC002 : 1998 RECOMMENDED PRACTICE FOR LAMINAR FLOW CLEAN AIR DEVICES
    SAE AIR1167:1970 ENVIRONMENTAL CRITERIA AND TESTS FOR AEROSPACE GROUND EQUIPMENT IN SUPPORT OF SPACE SYSTEMS
    ISO 14644-8:2013 Cleanrooms and associated controlled environments Part 8: Classification of air cleanliness by chemical concentration (ACC)
    SEMI E49 : 2017 GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY PIPING PERFORMANCE, SUBASSEMBLIES, AND FINAL ASSEMBLIES
    IEST RP CC026.2 : 2004 CLEANROOM OPERATIONS
    ISO 8573-8:2004 Compressed air — Part 8: Test methods for solid particle content by mass concentration
    SEMI F70 : 2011(R2017) TEST METHOD FOR DETERMINATION OF PARTICLE CONTRIBUTION OF GAS DELIVERY SYSTEM
    ISO 14644-3:2005 Cleanrooms and associated controlled environments Part 3: Test methods
    IEST RP CC013 : 86-T EQUIPMENT CALIBRATION OR VALIDATION PROCEDURES
    ISO 14644-1:2015 Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
    ISO 14644-9:2012 Cleanrooms and associated controlled environments Part 9: Classification of surface cleanliness by particle concentration
    SEMI F28 : 2003(R2015) TEST METHOD FOR MEASURING PARTICLE GENERATION FROM PROCESS PANELS
    IEST RP CC028.1 : 2002
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