14/30280736 DC : 0
Superseded
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BS EN ISO 14644-14 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 14 ASSESSMENT OF SUITABILITY FOR USE OF EQUIPMENT BY AIRBORNE PARTICLE CONCENTRATION
Hardcopy , PDF
English
31-10-2016
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 General outline of the assessment
5 Visual inspection
6 Assessment of suitability by airborne
particle concentration measurements
7 Documentation
8 Statement on cleanroom suitability
Annex A (informative) - Example for data processing
for determining the cleanroom suitability
deriving from measurements
Annex B (informative) - Additional tests as options
Bibliography
BS EN ISO 14644-14.
| Committee |
LBI/30
|
| DocumentType |
Draft
|
| Pages |
27
|
| PublisherName |
British Standards Institution
|
| Status |
Superseded
|
| SupersededBy |
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