FOREWORD
1 Scope
2 Normative references
3 Terms and definitions
4 Description of trench structures in a
micrometer scale
5 Description of needle structures in a
micrometer scale
6 Measurement method
Annex A (informative) - Examples of measurement for
trench & needle structures in a micrometer scale
Annex B (informative) - Uncertainty in Dimensional
Measurement
Bibliography