16/30338636 DC : 0
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
BS IEC 62047-30 - SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 30: MEASUREMENT METHODS OF ELECTRO-MECHANICAL CONVERSION CHARACTERISTICS OF MEMS PIEZOELECTRIC THIN FILM
Hardcopy , PDF
31-10-2017
English
Important note : Users cannot be edited or removed once added to your Multi user PDF.
FOREWORD
1 Scope
2 Normative references
3 Terms and definitions
4 Test bed of MEMS piezoelectric
thin film
5 Thin film under testing
6 Test report
Annex A (informative) - Example of measuring
method of MEMS piezoelectric thin film
Bibliography
BS IEC 62047-30.
| Committee |
EPL/47
|
| DocumentType |
Draft
|
| Pages |
38
|
| PublisherName |
British Standards Institution
|
| Status |
Superseded
|
| EN 50324-2:2002 | Piezoelectric properties of ceramic materials and components - Part 2: Methods of measurement - Low power |
| IEC 60483:1976 | Guide to dynamic measurements of piezoelectric ceramics with high electromechanical coupling |
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.