Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Descriptions of the influence quantities
Annex A (informative) - Classification of in-plane
scanning technologies for confocal microscopes
Annex B (informative) - Theory of operation of confocal
microscopes
Annex C (informative) - Thin and thick films with CMs
Annex D (informative) - Relation to the GPS matrix model
Bibliography